Interfacial Characteristics of Copper/Diffusion Barrier/Low Dielectric Constant Material Systems at Elevated Temperatures
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: International Journal of the Society of Materials Engineering for Resources
سال: 2002
ISSN: 1884-6629,1347-9725
DOI: 10.5188/ijsmer.10.138